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Plasma processing XIV : proceedings of the international symposium

責任表示:
editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-17
出版情報:
Pennington, N.J.: Electrochemical Society, 2002
ISSN:
01616374
ISBN:
9781566773416 [1566773415]
請求記号:
E23400/200217
資料種別:
国際会議録
巻号一覧
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