Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
- 責任表示:
- editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2002-2
- 出版情報:
- Pennington, NJ: Electrochemical Society, 2002
- ISSN:
- 01616374
- ISBN:
- 9781566773744 [1566773741]
- 請求記号:
- E23400/2002-2
- 資料種別:
- 国際会議録
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