Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany | 東京工業大学附属図書館資料名データベース

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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

責任表示:: editors, B.O. Kolbesen ... [et al.]
シリーズ名:: Electrochemical Society Proceedings Series
シリーズ巻号:: 2001-29
出版情報:: Pennington, N.J.: Electrochemical Society, 2001
ISSN:: 01616374
ISBN:: 9781566773638 [1566773636]
請求記号:: E23400/200129
資料種別:: 国際会議録

巻号一覧

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詳細

TDL書誌ID:	ZA00014033
シリーズＩＤ:	PA00000028
会議名:	Symposium on Crystalline Defects and Contamination - DECON ; European Solid State Device Research Conference - ESSDERC
回次:	3rd (2001) ; 31st (2001)
会議開催地:	Nuremberg, Germany
会議開催年:	2001.09.11-2001.09.13

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