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Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

責任表示:
editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-6
出版情報:
Pennington, New Jersey: Electrochemical Society, 1999
ISSN:
01616374
ISBN:
9781566772280 [1566772281]
請求記号:
E23400/99-6
資料種別:
国際会議録
巻号一覧
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