Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability | 東京工業大学附属図書館資料名データベース

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Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

責任表示:: editors, P. C. Andricacos ...[et al.]
シリーズ名:: Electrochemical Society Proceedings Series
シリーズ巻号:: 98-6
出版情報:: Pennington, N.J.: Electrochemical Society, 1999
ISSN:: 01616374
ISBN:: 9781566772006 [1566772001]
請求記号:: E23400/98-6
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00013909
シリーズＩＤ:	PA00000028
会議名:	Symposia on Electrochemical Processing in ULSI Fabrication ; Meeting of the Electrochemical Society ; Interconnect and Contact Metallization: Materials, Processes, and Reliability ; Meeting of the Electrochemical Society
回次:	1st ; 193rd ; 1998 ; 194th
会議開催地:	San Diego, CA, USA ; San Diego, CA, USA ; Boston, MA, USA ; Boston, MA, USA
会議開催年:	1998.05.04-1998.05.05 ; 1998.05.04-1998.05.05 ; 1998.11.01-1998.11.06 ; 1998.11.01-1998.11.06

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