Proceedings of the twelfth International Symposium on Plasma Processing
- 責任表示:
- editor, G.S. Mathad ; [sponsored by] Dielectric Science & Technology and electronics Divisions
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-4
- 出版情報:
- Pennington, NJ: Electrochemical Society, 1998
- ISSN:
- 01616374
- ISBN:
- 9781566771986 [1566771986]
- 請求記号:
- E23400/98-4
- 資料種別:
- 国際会議録
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