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Dielectric material integration for microelectronics

責任表示:
editors W.D. Brown ... [et al.] ; Dielectric Science and Technology, and Electronics Divisions [of the Electrochemical Society]
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-3
出版情報:
Pennington, NJ: Electrochemical Society, 1998
ISSN:
01616374
ISBN:
9781566771979 [1566771978]
請求記号:
E23400/98-3
資料種別:
国際会議録
巻号一覧
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