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Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

責任表示:
editors M. Jamal Deen ... [et al.] ; Dielectric Science and Technology and Electronics Divisions [of the Electrochemical Society]
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-10
出版情報:
Pennington, New Jersey: Electrochemical Society, 1997
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
請求記号:
E23400/97-10
資料種別:
国際会議録
巻号一覧
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