Proceedings of the eleventh International Symposium on Plasma Processing
- 責任表示:
- editors, G.S. Mathad, M. Meyyappan ; [sponsored by] Dielectric Science and Technology and electronics Divisions
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 96-12
- 出版情報:
- Pennington, NJ: Electrochemical Society, 1996
- ISSN:
- 01616374
- ISBN:
- 9781566771641 [1566771641]
- 請求記号:
- E23400/962354
- 資料種別:
- 国際会議録
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