Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA
- 責任表示:
- Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5193
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering, 2004
- ISSN:
- 0277786X
- ISBN:
- 9780819450661 [0819450669]
- 請求記号:
- P63600/5193
- 資料種別:
- 国際会議録
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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA
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