Nitrides and oxynitrides 2 : proceedings of the third International Symposium on Nitrides, held in Sevilla, Spain, July 5-7, 2000
- 責任表示:
- editors, Michael J. Pomeroy ... [et al.]
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 383
- 出版情報:
- Zurich-Uetikon, Switzerland: Trans Tech Publications, 2002
- ISSN:
- 02555476
- ISBN:
- 9780878498871 [0878498877]
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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11
国際会議録
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
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