
Thin Film Materials, Processes, and Reliability
- 責任表示:
- editors, G. Mathad ... [et al.]
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 6(12)
- 出版情報:
- Pennington, N.J.: Electrochemical Society, 2007
- ISSN:
- 19385862
- ISBN:
- 9781604238884 [1604238887]
- 請求記号:
- E23400/6-9 [12]
- 資料種別:
- 国際会議録
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