Cleaning and surface conditioning technology in semiconductor device manufacturing 10

責任表示:

editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics

シリーズ名:

ECS transactions

シリーズ巻号:

11(2)

出版情報:

Pennington, N.J.: Electrochemical Society, 2007

ISSN:

19385862

ISBN:

9781566775687 [156677568X]

請求記号:

E23400/11-2

資料種別:

国際会議録