Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA
- 責任表示:
- Ernst-Bernhard Kley, Hans Peter Herzing, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5183
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering, 2003
- ISSN:
- 0277786X
- ISBN:
- 9780819450562 [0819450561]
- 請求記号:
- P63600/5183
- 資料種別:
- 国際会議録
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