
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA
- 責任表示:
- Alfred K.K. Wong, Kevin M. Monahan, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5043
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2003
- ISSN:
- 0277786X
- ISBN:
- 9780819448484 [0819448486]
- 請求記号:
- P63600/5043
- 資料種別:
- 国際会議録
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