MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
- 責任表示:
- Janson
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4981
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2003
- ISSN:
- 0277786X
- ISBN:
- 9780819447814 [0819447811]
- 請求記号:
- P63600/4981
- 資料種別:
- 国際会議録
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