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Chemical physics of thin film deposition processes for micro- and nano-technologies

責任表示:
edited by Yves Pauleau
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:
55
出版情報:
Dordrecht: Kluwer Academic Publishers, 2002
ISBN:
9781402005244 [1402005245]
請求記号:
N17050/55
資料種別:
国際会議録
巻号一覧
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