Chemical physics of thin film deposition processes for micro- and nano-technologies
- 責任表示:
- edited by Yves Pauleau
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 55
- 出版情報:
- Dordrecht: Kluwer Academic Publishers, 2002
- ISBN:
- 9781402005244 [1402005245]
- 請求記号:
- N17050/55
- 資料種別:
- 国際会議録
類似資料:
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
国際会議録
ZnO based thin films, nano-wires, and nano-belts for photonic and electronic devices and sensors
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Kluwer Academic Publishers |
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