Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
- 責任表示:
- MOEMS 2002 : 6-8 May, 2002, Cannes, France
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4755
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2002
- ISSN:
- 0277786X
- ISBN:
- 9780819445186 [0819445185]
- 請求記号:
- P63600/4755
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France
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12
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MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
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