
Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA
- 責任表示:
- Michael R. Descour, Juha T. Rantala, chairs
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4647
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering, 2002
- ISSN:
- 0277786X
- ISBN:
- 9780819443861 [0819443867]
- 請求記号:
- P63600/4647
- 資料種別:
- 国際会議録
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