Micromachining and Microfabrication Process Technology and Devices
- 責任表示:
- Tien
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4601
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- 請求記号:
- P63600/4601
- 資料種別:
- 国際会議録
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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
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