Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia | 東京工業大学附属図書館資料名データベース

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Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia

責任表示:: Paul D. Frnazon, chair
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4593
出版情報:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
ISSN:: 0277786X
ISBN:: 9780819443236 [0819443239]
請求記号:: P63600/4593
資料種別:: 国際会議録

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TDL書誌ID:	ZA00012421
シリーズＩＤ:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

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