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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia

責任表示:
Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4592
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
ISSN:
0277786X
ISBN:
9780819443229 [0819443220]
請求記号:
P63600/4592
資料種別:
国際会議録
巻号一覧
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