Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia | 東京科学大学図書館資料名データベース

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Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia

責任表示:: Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4591
出版情報:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
ISSN:: 0277786X
ISBN:: 9780819443212 [0819443212]
請求記号:: P63600/4591
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00012419
シリーズＩＤ:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Electronics and structures for MEMS
回次:	2001 : 2nd
会議開催地:	Adelaide, Australia
会議開催年:	2001.12.17-2001.12.19

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