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MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA

責任表示:
Henry Helvajan, Siegfried W. Janson, Franz Lärmer, chair
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4559
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
ISSN:
0277786X
ISBN:
9780819442871 [0819442879]
請求記号:
P63600/4559
資料種別:
国際会議録
巻号一覧
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