Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- 責任表示:
- MOEMS : 22-24 October 2001, San Trancisco, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4558
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- 請求記号:
- P63600/4558
- 資料種別:
- 国際会議録
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SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
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SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
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MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA
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SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |