In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK | 東京工業大学附属図書館資料名データベース

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In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK

責任表示:: Gudrun Kissinger, Larg H. Weiland, chairs
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4406
出版情報:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering, 2001
ISSN:: 0277786X
ISBN:: 9780819441072 [0819441074]
請求記号:: P63600/4406
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00012122
シリーズＩＤ:	PA00000029
会議名:	Microelectronic Manufacturing Technologies : In-Line Characterization, Yield, Reliability, and Failure Analysis in Microelectronic Manufacturing
回次:	2001 : 2nd
会議開催地:	Edinburgh, UK
会議開催年:	2001.05.31-2001.06.01

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