High Purity Silicon VI : proceedings of the sixth International Symposium | 東京工業大学附属図書館資料名データベース

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High Purity Silicon VI : proceedings of the sixth International Symposium

責任表示:: editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 4218
出版情報:: Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering, 2000
ISSN:: 0277786X
ISBN:: 9781566772846 [1566772842]
請求記号:: P63600/4218
資料種別:: 国際会議録

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詳細

TDL書誌ID:	ZA00011937
シリーズＩＤ:	PA00000029
会議名:	Internationa Symposium on High Purity Silicon [ SPIE 0819438901 ] : Meeting of the Electrochemical Society
回次:	6th : 198th
会議開催地:	Phoenix, AZ, USA
会議開催年:	2000.10.22-2000.10.27

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