Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- Editor(s), etc.:
- editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3895
- Pub. info.:
- Pennington, N.J.: SPIE - The International Society for Optical Engineering, 1999
- ISSN:
- 0277786X
- ISBN:
- 9780819434975 [0819434973]
- Call no.:
- P63600/3895
- Type:
- Conference Proceedings