Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
- Editor(s), etc.:
- editors, O.J. Glembocki ... [et al.]
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 324
- Pub. info.:
- Pittsburgh: MRS - Materials Research Society, 1994
- ISSN:
- 02729172
- ISBN:
- 9781558992238 [1558992235]
- Call no.:
- M23500/324
- Type:
- Conference Proceedings