Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.

Editor(s), etc.:

editors, Stella W. Pang ... [et al.]

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

406

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society, 1996

ISSN:

02729172

ISBN:

9781558993099 [1558993096]

Call no.:

M23500/406

Type:

Conference Proceedings