Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France
- Editor(s), etc.:
- editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2005-10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society, 2005
- ISSN:
- 01616374
- ISBN:
- 9781566774284 [1566774284]
- Call no.:
- E23400/200510
- Type:
- Conference Proceedings