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Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France

Editor(s), etc.:
editors, Bernd O. Kolbesen ... [et al.] ; sponsoring division, Electronics and Photonics
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-10
Pub. info.:
Pennington, N.J.: Electrochemical Society, 2005
ISSN:
01616374
ISBN:
9781566774284 [1566774284]
Call no.:
E23400/200510
Type:
Conference Proceedings
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