Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

Editor(s), etc.:

edited by R. Novak ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-3

Pub. info.:

Pennington, NJ: Electrochemical Society, 1994

ISSN:

01616374

ISBN:

9781566770651 [1566770653]

Call no.:

E23400/941395

Type:

Conference Proceedings