Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing | 東京工業大学附属図書館資料名データベース

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Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

Editor(s), etc.:: France : crystalline defects and contamination: their impact and control in device manufacturing
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1993-15
Pub. info.:: Pennington, NJ: Electrochemical Society, 1993
ISSN:: 01616374
ISBN:: 9781566770590 [1566770599]
Call no.:: E23400/932030
Type:: Conference Proceedings

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Details

TDL ID:	ZA00014104
Series ID:	PA00000028
Conf. info.(Name):	European Solid State Device Research Conference - ESSDERC ; Symposium on Crystalline Defects and Contamination
Conf. info.(Number):	23rd ; 1993
Conf. info.(Venue):	Grenoble, France
Conf. info.(Date):	1993.09.17

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