Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology

Editor(s), etc.:

edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy ; [sponsored by] Electronics Division

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-6

Pub. info.:

Pennington, NJ: Electrochemical Society, 1993

ISSN:

01616374

ISBN:

9781566770644 [1566770645]

Call no.:

E23400/930578

Type:

Conference Proceedings