Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany | 東京工業大学附属図書館資料名データベース

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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

Editor(s), etc.:: editors, B.O. Kolbesen ... [et al.]
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 2001-29
Pub. info.:: Pennington, N.J.: Electrochemical Society, 2001
ISSN:: 01616374
ISBN:: 9781566773638 [1566773636]
Call no.:: E23400/200129
Type:: Conference Proceedings

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Details

TDL ID:	ZA00014033
Series ID:	PA00000028
Conf. info.(Name):	Symposium on Crystalline Defects and Contamination - DECON ; European Solid State Device Research Conference - ESSDERC
Conf. info.(Number):	3rd (2001) ; 31st (2001)
Conf. info.(Venue):	Nuremberg, Germany
Conf. info.(Date):	2001.09.11-2001.09.13

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