Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II | 東京工業大学附属図書館資料名データベース

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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II

Editor(s), etc.:: editors, Bernd O. Kolbesen ... [et al.] ; Electronics Division [of the Electrochemical Society]
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 97-22
Pub. info.:: Pennington, NJ: Electrochemical Society, 1997
ISSN:: 01616374
ISBN:: 9781566771757 [1566771757]
Call no.:: E23400/97-22
Type:: Conference Proceedings

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Details

TDL ID:	ZA00013884
Series ID:	PA00000028
Conf. info.(Name):	Symposium on Crystalline Defects and Contamination ; Symposium on Silicon Cleaning Technology ; Meeting of the Electrochemical Society ; Annual Meeting of the International Society of Electrochemistry
Conf. info.(Number):	2nd ; 1997 ; 192nd ; 48th
Conf. info.(Venue):	Paris, France
Conf. info.(Date):	1997.08.31-1997.09.02

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