ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

Editor(s), etc.:

edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-30

Pub. info.:

Pennington, NJ: Electrochemical Society, 1995

ISSN:

01616374

ISBN:

9781566771221 [1566771226]

Call no.:

E23400/961027

Type:

Conference Proceedings