Analytical and diagnostic techniques for semiconductor materials, devices and processes 7
- Editor(s), etc.:
- editors, D. K. Schroder ... [et al.]. ; sponsoring divisions, Electronics and Photonics, Dielectric Science & Technology
- Title of ser.:
- ECS transactions
- Ser. no.:
- 11(3)
- Pub. info.:
- Pennington, N.J.: Electrochemical Society, 2007
- ISSN:
- 19385862
- ISBN:
- 9781566775694 [1566775698]
- Call no.:
- E23400/11-3
- Type:
- Conference Proceedings