Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.827-830, 2006. Stafa-Zuerich. Trans Tech Publications
Rambach, M. ; Bauer, A. J. ; Frey, L. ; Friedrichs, P. ; Ryssel, H.
出版情報:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.621-624, 2005. Uetikon-Zuerich. Trans Tech Publications
Bauer, A. G. ; Paskaleva, A. ; Lemberger, M. ; Frey, L. ; Ryssel, H.
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.125-132, 2005. Pennington, NJ. Electrochemical Society
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.21-27, 2003. Pennington, N.J.. Electrochemical Society
Rommel, M. ; Graft, M. ; Frey, L. ; Bauer, A. J. ; Ryssel, H.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.113-122, 2005. Pennington, N.J.. Electrochemical Society
Lemberger, M. ; Schon, F. ; Dirnecker, T. ; Jank, M. P. M. ; Pakaleva, A. ; Bauer, A. J. ; Frey, L. ; Ryssel, H.
出版情報:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.873-880, 2005. Pennington, NJ. Electrochemical Society
Buegler, J. ; Zielonka, G. ; Pfitzner, L. ; Ryssel, H. ; Schottler, M.
出版情報:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.294-307, 2001. Pennington, N.J.. Electrochemical Society
Treu, M. ; Schorner, R. ; Friedrichs, P. ; Rupp, R. ; Wiedenhofer, A. ; Stephani, D. ; Ryssel, H.
出版情報:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.1089-1092, 2000. Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.973-976, 2004. Uetikon-Zuerich. Trans Tech Publications
Rambach, M. ; Weiss, R. ; Frey, L. ; Bauer, A.J. ; Ryssel, H.
出版情報:
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1073-1076, 2004. Uetikon-Zuerich. Trans Tech Publications
国際会議録
