Lu, Y.F. ; Takai, M. ; Sanda, H. ; Chayahara, A. ; Satou, M. ; Minamisono, T. ; Namba, S.
出版情報:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.301-306, 1990. Pittsburgh, Pa.. Materials Research Society