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Silver Metallization With Reactively Sputtered TiN Diffusion Barrier Films

著者名:
Gao, L.
Gstottner, J.
Emling, R.
Linsmeier, Ch.
Balden, M.
Wiltner, A.
Hansch, W.
Schmitt-Landsiedel, D.
さらに 3 件
掲載資料名:
Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
812
発行年:
2004
開始ページ:
255
終了ページ:
260
総ページ数:
6
出版情報:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558997622 [1558997628]
言語:
英語
請求記号:
M23500/812
資料種別:
国際会議録

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