Wolfe, D. ; Flock, K. ; Therrien, R. ; Johnson, R. ; Rayner, B. ; Gunther, L. ; Brown, N. ; Claflin, B. ; Lucovsky, G.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.343-, 1999. Warrendale, PA. MRS - Materials Research Society
Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Claflin, B. ; Binger, M. ; Lucovsky, G. ; Yang, H.-Y.
出版情報:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.171-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.603-, 1999. Warrendale, PA. MRS - Materials Research Society