M. Imade ; A. Ishikawa ; Y. Nakagawa ; M. Yoshimura ; Y. Kitaoka
出版情報:
Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA. pp.65-68, 2012. Aedermannsdorf, Switzerland. Trans Tech Publications
T. Haruna ; Y. Nakagawa ; D. Terada ; N. Takata ; N. Tsuji
出版情報:
PRICM 7 : selected peer review papers from the seventh Pacific Rim International Conference on Advanced Materials and Processing, August 2-6, 2010, Cairns, Australia. pp.1235-1238, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
T. Yoshida ; T. Yoshitake ; K. Sumitani ; R. Ohtani ; Y. Nakagawa
出版情報:
THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009. pp.2921-2926, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
Y. Nakagawa ; T. Yoshitake ; K. Hanada ; A. Nagano ; R. Ohtani
出版情報:
THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009. pp.2927-2932, 2010. Aedermannsdorf, Switzerland. Trans Tech Publications
N. Kobayashi ; K. Goto ; T. Wakatsuki ; T. Komagata ; Y. Nakagawa
出版情報:
Photomask and next-generation lithography mask technology XV. 2 pp.70281Y-1-70281Y-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering