Min, B. G. ; Jeon, K. S. ; Pae, Y. H. ; Ko, D.-H. ; Cho, M.-H. ; Lee, T.-W.(Yonsei Univ.)
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.279-280, 2004. Pennington, N.J.. Electrochemical Society
Nam, S. ; Nam, S.W. ; Yoo, J.H. ; Ko, D.-H. ; Ku, Ja-Hum ; Choi, Siyoung
出版情報:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.221-226, 2002. Warrendale. Materials Research Society
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.268-275, 2001. Pennington, N.J.. Electrochemical Society
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.276-283, 2001. Pennington, N.J.. Electrochemical Society
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2002. Warrendale, PA. Materials Research Society