Preparation of Cubic Boron Nitride Films by Bias Sputtering

Preparation of Cubic Boron Nitride Films by Bias Sputtering

著者名:

掲載資料名:

Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1993-12

発行年:

1993

開始ページ:

216

終了ページ:

226

総ページ数:

11

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770279 [1566770270]

言語:

英語

請求記号:

E23400/932027

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014101
シリーズID:	PA00000028
会議名:	International Symposium on Electrochemical Processing of Tailored Materials
回次:	2nd
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1993.05.16-1993.05.21

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