1.

国際会議録
国際会議録
1. Defect Identification by Using Laser Imaging Confocal Microscopy (LICM)
Cai,C. ; Uritsky,Y. ; Francis,T. ; Xu,J. ; Worster,B.
出版情報: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.187-192,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3322
2.

国際会議録
国際会議録
2. Analysis of defect classification and sizing information with a dedicated white-light/laserconfocal microscope review station
Xu,J. ; Norton,K. ; Worster,B. ; Du,C. ; Lum,G. ; Allard,M.E.
出版情報: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.511-521,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3236