1.

国際会議録
国際会議録
1. Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry
Yakovlev,V.A. ; Bosch-Charpenay,S. ; Rosenthal,P.A. ; Solomon,P.R. ; Xu,J. ; Stover,J.C. ; Anc,M.J. ; Alles,M.L.
出版情報: Optical diagnostic methods for inorganic transmissive materials II : 3-4 August 2000, San Diego, USA.  pp.90-97,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4103
2.

国際会議録
国際会議録
2. Compact FTIR wafer-state sensors: a new way of in-line ULSI characterization
Yakovlev,V.A. ; Charpenay,S. ; Richter,M. ; Rosenthal,P.A. ; Solomon,P.R. ; Xu,J.
出版情報: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.74-83,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3509