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Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry

著者名:
Yakovlev,V.A. ( On-Line Technologies Inc. )
Bosch-Charpenay,S.
Rosenthal,P.A.
Solomon,P.R.
Xu,J.
Stover,J.C.
Anc,M.J.
Alles,M.L.
さらに 3 件
掲載資料名:
Optical diagnostic methods for inorganic transmissive materials II : 3-4 August 2000, San Diego, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4103
発行年:
2000
開始ページ:
90
終了ページ:
97
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437488 [0819437484]
言語:
英語
請求記号:
P63600/4103
資料種別:
国際会議録

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