Ridley, R. ; Wu, C.-T. ; Roman, P. ; Dolny, G. ; Grebs, T. ; Stensney, F. ; Ruzyllo, J.
出版情報:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.158-164, 1999. Pennington, NJ. Electrochemical Society
Roman, P. ; Lee, D.-O. ; Wang, J. ; Wu, C.-T. ; Subramanian, V. ; Brubaker, M. ; Mumbauer, P. ; Grant, R. ; Ruzyllo, J.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.241-248, 2001. Pennington, N.J.. Electrochemical Society
Le Roux, V. ; Machicoane, G. ; Borsoni, G. ; Korwin-Pawlowski, M. ; Bechu, N. ; Kerdiles, S. ; Laffitte, R. ; Valuer, L. ; Roman, P. ; Wu, C.-T. ; Ruzyllo, J.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.249-257, 2001. Pennington, N.J.. Electrochemical Society