IN-SITU MULTIPROCESSING OF ULTRATHIN SILICON NITRIDE CAPACITORS FOR ADVANCED DRAM CELLS
- 著者名:
Thakur, R. P. S. Hawthorne, R. Mathews, V. K. Fazan, P. C. Werkhoven, C .J. Granneman, E. Wilhelm, R. - 掲載資料名:
- Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 342
- 発行年:
- 1994
- 開始ページ:
- 195
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992429 [1558992421]
- 言語:
- 英語
- 請求記号:
- M23500/342
- 資料種別:
- 国際会議録
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